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dc.contributor.authorKrishnamoorthy, Sivashankar-
dc.contributor.authorVan den Boogaart, Marc Antonius Friedrich-
dc.contributor.authorBrugger, Juergen-
dc.contributor.authorHibert, Cyrille-
dc.contributor.authorPugin, Raphael-
dc.contributor.authorHinderling, Christian-
dc.contributor.authorHeinzelmann, Harry-
dc.date.accessioned2018-12-07T13:21:27Z-
dc.date.available2018-12-07T13:21:27Z-
dc.date.issued2008-
dc.identifier.issn0935-9648de_CH
dc.identifier.issn1521-4095de_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/13664-
dc.description.abstractA novel and flexible top‐down/bottom‐up scheme to achieve (sub‐)micrometer scale patterning of nanostructures with complementary micro‐/nanoarchitectures is presented. Nanostencils (perforated free‐standing Si3N4 membranes) are employed to pattern silicon nanopillars derived from the use of self‐assembled copolymer micelles as dry etch masks.de_CH
dc.language.isoende_CH
dc.publisherWileyde_CH
dc.relation.ispartofAdvanced Materialsde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subject.ddc620.11: Werkstoffede_CH
dc.titleCombining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfacesde_CH
dc.typeBeitrag in wissenschaftlicher Zeitschriftde_CH
dcterms.typeTextde_CH
zhaw.departementLife Sciences und Facility Managementde_CH
zhaw.organisationalunitInstitut für Chemie und Biotechnologie (ICBT)de_CH
dc.identifier.doi10.1002/adma.200702478de_CH
zhaw.funding.euNode_CH
zhaw.issue18de_CH
zhaw.originated.zhawYesde_CH
zhaw.pages.end3538de_CH
zhaw.pages.start3533de_CH
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume20de_CH
zhaw.publication.reviewPeer review (Publikation)de_CH
Appears in collections:Publikationen Life Sciences und Facility Management

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Krishnamoorthy, S., Van den Boogaart, M. A. F., Brugger, J., Hibert, C., Pugin, R., Hinderling, C., & Heinzelmann, H. (2008). Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials, 20(18), 3533–3538. https://doi.org/10.1002/adma.200702478
Krishnamoorthy, S. et al. (2008) ‘Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces’, Advanced Materials, 20(18), pp. 3533–3538. Available at: https://doi.org/10.1002/adma.200702478.
S. Krishnamoorthy et al., “Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces,” Advanced Materials, vol. 20, no. 18, pp. 3533–3538, 2008, doi: 10.1002/adma.200702478.
KRISHNAMOORTHY, Sivashankar, Marc Antonius Friedrich VAN DEN BOOGAART, Juergen BRUGGER, Cyrille HIBERT, Raphael PUGIN, Christian HINDERLING und Harry HEINZELMANN, 2008. Combining micelle self-assembly with nanostencil lithography to create periodic/aperiodic micro-/nanopatterns on surfaces. Advanced Materials. 2008. Bd. 20, Nr. 18, S. 3533–3538. DOI 10.1002/adma.200702478
Krishnamoorthy, Sivashankar, Marc Antonius Friedrich Van den Boogaart, Juergen Brugger, Cyrille Hibert, Raphael Pugin, Christian Hinderling, and Harry Heinzelmann. 2008. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials 20 (18): 3533–38. https://doi.org/10.1002/adma.200702478.
Krishnamoorthy, Sivashankar, et al. “Combining Micelle Self-Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro-/Nanopatterns on Surfaces.” Advanced Materials, vol. 20, no. 18, 2008, pp. 3533–38, https://doi.org/10.1002/adma.200702478.


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