A high bandwidth, short stroke rotary shaker for MEMS testing

Warden, Michael; Hofstettler, P.; Rindlisbacher, W.; Stomas, A.; Wälti, P.

Publication type:	Conference paper
Type of review:	Not specified
Title:	A high bandwidth, short stroke rotary shaker for MEMS testing
Authors:	Warden, Michael Hofstettler, P. Rindlisbacher, W. Stomas, A. Wälti, P.
Conference details:	15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008
Issue Date:	2008
Language:	English
Subject (DDC):	621.3: Electrical, communications, control engineering
URI:	https://digitalcollection.zhaw.ch/handle/11475/15620
Fulltext version:	Published version
License (according to publishing contract):	Licence according to publishing contract
Departement:	School of Engineering
Organisational Unit:	Institute of Mechatronic Systems (IMS)
Appears in collections:	Publikationen School of Engineering

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Warden, M., Hofstettler, P., Rindlisbacher, W., Stomas, A., & Wälti, P. (2008). A high bandwidth, short stroke rotary shaker for MEMS testing. 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008.

Warden, M. et al. (2008) ‘A high bandwidth, short stroke rotary shaker for MEMS testing’, in 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008.

M. Warden, P. Hofstettler, W. Rindlisbacher, A. Stomas, and P. Wälti, “A high bandwidth, short stroke rotary shaker for MEMS testing,” in 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008, 2008.

WARDEN, Michael, P. HOFSTETTLER, W. RINDLISBACHER, A. STOMAS und P. WÄLTI, 2008. A high bandwidth, short stroke rotary shaker for MEMS testing. In: 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008. Conference paper. 2008

Warden, Michael, P. Hofstettler, W. Rindlisbacher, A. Stomas, and P. Wälti. 2008. “A High Bandwidth, Short Stroke Rotary Shaker for MEMS Testing.” Conference paper. In 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008.

Warden, Michael, et al. “A High Bandwidth, Short Stroke Rotary Shaker for MEMS Testing.” 15th Saint Petersburg International Conference on Integrated Navigation Systems, Saint Petersburg, Russia, 26-28 May 2008, 2008.