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dc.contributor.authorEvans, Anna-
dc.contributor.authorPrestat, Michel-
dc.contributor.authorTölke, R.-
dc.contributor.authorSchlupp, M. V. F.-
dc.contributor.authorGauckler, L. J.-
dc.contributor.authorSafa, Yasser-
dc.contributor.authorHocker, Thomas-
dc.contributor.authorCourbat, J.-
dc.contributor.authorBriand, D.-
dc.contributor.authorde Rooij, N. F.-
dc.contributor.authorCourty, D.-
dc.date.accessioned2017-11-30T15:07:40Z-
dc.date.available2017-11-30T15:07:40Z-
dc.date.issued2012-06-11-
dc.identifier.issn1615-6846de_CH
dc.identifier.issn1615-6854de_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/1637-
dc.description.abstractThe residual stress and buckling patterns of free-standing 8 mol.% yttria-stabilized-zirconia (8YSZ) membranes prepared by pulsed laser deposition and microfabrication techniques on silicon substrates are investigated by wafer curvature, light microscopy, white light interferometry, and nanoindentation. The 300 nm thin 8YSZ membranes (390 × 390 Micron) deposited at 25°C are almost flat after free-etching, whereas deposition at 700°C yields strongly buckled membranes with a compressive stress of -1,100 ± 150 MPa and an out-of-plane-displacement of 6.5 lm. These latter membranes are mechanically stable during thermal cycling up to 500°C. Numerical simulations of the buckling shape using the Rayleigh-Ritz-method and a Young’s modulus of 200 GPa are in good agreement with the experimental data. The simulated buckling patterns are used to extract the local stress distribution within the freestanding membrane which consists of tensile and compressive stress regions that are below the failure stresses. This is important regarding the application in, e.g., microsolid oxide fuel cell membranes which must be thermomechanically stable during microfabrication and device operation.de_CH
dc.language.isoende_CH
dc.publisherWileyde_CH
dc.relation.ispartofFuel Cellsde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subjectPulsed Laser Depositionde_CH
dc.subjectBucklingde_CH
dc.subjectMicro-solid Oxide Fuel Cellde_CH
dc.subjectFree-standing Membranede_CH
dc.subject.ddc530: Physikde_CH
dc.subject.ddc621.3: Elektro-, Kommunikations-, Steuerungs- und Regelungstechnikde_CH
dc.titleResidual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser depositionde_CH
dc.typeBeitrag in wissenschaftlicher Zeitschriftde_CH
dcterms.typeTextde_CH
zhaw.departementSchool of Engineeringde_CH
zhaw.organisationalunitInstitute of Computational Physics (ICP)de_CH
dc.identifier.doi10.1002/fuce.201200028de_CH
zhaw.funding.euNode_CH
zhaw.issue4de_CH
zhaw.originated.zhawYesde_CH
zhaw.pages.end623de_CH
zhaw.pages.start614de_CH
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume12de_CH
zhaw.publication.reviewPeer review (Publikation)de_CH
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Evans, A., Prestat, M., Tölke, R., Schlupp, M. V. F., Gauckler, L. J., Safa, Y., Hocker, T., Courbat, J., Briand, D., de Rooij, N. F., & Courty, D. (2012). Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition. Fuel Cells, 12(4), 614–623. https://doi.org/10.1002/fuce.201200028
Evans, A. et al. (2012) ‘Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition’, Fuel Cells, 12(4), pp. 614–623. Available at: https://doi.org/10.1002/fuce.201200028.
A. Evans et al., “Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition,” Fuel Cells, vol. 12, no. 4, pp. 614–623, Jun. 2012, doi: 10.1002/fuce.201200028.
EVANS, Anna, Michel PRESTAT, R. TÖLKE, M. V. F. SCHLUPP, L. J. GAUCKLER, Yasser SAFA, Thomas HOCKER, J. COURBAT, D. BRIAND, N. F. DE ROOIJ und D. COURTY, 2012. Residual stress and buckling patterns of free-standing yttria-stabilized-zirconia membranes fabricated by pulsed laser deposition. Fuel Cells. 11 Juni 2012. Bd. 12, Nr. 4, S. 614–623. DOI 10.1002/fuce.201200028
Evans, Anna, Michel Prestat, R. Tölke, M. V. F. Schlupp, L. J. Gauckler, Yasser Safa, Thomas Hocker, et al. 2012. “Residual Stress and Buckling Patterns of Free-Standing Yttria-Stabilized-Zirconia Membranes Fabricated by Pulsed Laser Deposition.” Fuel Cells 12 (4): 614–23. https://doi.org/10.1002/fuce.201200028.
Evans, Anna, et al. “Residual Stress and Buckling Patterns of Free-Standing Yttria-Stabilized-Zirconia Membranes Fabricated by Pulsed Laser Deposition.” Fuel Cells, vol. 12, no. 4, June 2012, pp. 614–23, https://doi.org/10.1002/fuce.201200028.


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