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  2. School of Engineering
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  4. Publikationen School of Engineering
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dc.contributor.authorAbbott, Charles-
dc.contributor.authorAllott, Ric M.-
dc.contributor.authorBann, Bob-
dc.contributor.authorBoehlen, Karl L.-
dc.contributor.authorGower, Malcolm C.-
dc.contributor.authorRumsby, Phil T.-
dc.contributor.authorStassen Böhlen, Ines-
dc.contributor.authorSykes, Neil-
dc.date.accessioned2019-03-29T09:45:34Z-
dc.date.available2019-03-29T09:45:34Z-
dc.date.issued2002-
dc.identifier.issn0277-786Xde_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/16448-
dc.description.abstractTwo new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown.de_CH
dc.language.isoende_CH
dc.publisherInternational society for optical engineeringde_CH
dc.relation.ispartofProceedings / SPIEde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subjectLaser micromachiningde_CH
dc.subjectInkjet printer nozzlede_CH
dc.subjectPlasma display panelde_CH
dc.subject.ddc621.3: Elektro-, Kommunikations-, Steuerungs- und Regelungstechnikde_CH
dc.titleNew techniques for laser micromachining MEMS devicesde_CH
dc.typeKonferenz: Paperde_CH
dcterms.typeTextde_CH
zhaw.departementSchool of Engineeringde_CH
zhaw.organisationalunitInstitut für Angewandte Mathematik und Physik (IAMP)de_CH
dc.identifier.doi10.1117/12.482096de_CH
zhaw.conference.detailsInternational Symposium on High-Power Laser Ablation 2002, Taos, USA, 21-26 April 2002de_CH
zhaw.funding.euNode_CH
zhaw.originated.zhawYesde_CH
zhaw.pages.end289de_CH
zhaw.pages.start281de_CH
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume4760de_CH
zhaw.publication.reviewNot specifiedde_CH
zhaw.title.proceedingsHigh-Power Laser Ablation IVde_CH
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Abbott, C., Allott, R. M., Bann, B., Boehlen, K. L., Gower, M. C., Rumsby, P. T., Stassen Böhlen, I., & Sykes, N. (2002). New techniques for laser micromachining MEMS devices [Conference paper]. Proceedings / SPIE, 4760, 281–289. https://doi.org/10.1117/12.482096
Abbott, C. et al. (2002) ‘New techniques for laser micromachining MEMS devices’, in Proceedings / SPIE. International society for optical engineering, pp. 281–289. Available at: https://doi.org/10.1117/12.482096.
C. Abbott et al., “New techniques for laser micromachining MEMS devices,” in Proceedings / SPIE, 2002, vol. 4760, pp. 281–289. doi: 10.1117/12.482096.
ABBOTT, Charles, Ric M. ALLOTT, Bob BANN, Karl L. BOEHLEN, Malcolm C. GOWER, Phil T. RUMSBY, Ines STASSEN BÖHLEN und Neil SYKES, 2002. New techniques for laser micromachining MEMS devices. In: Proceedings / SPIE. Conference paper. International society for optical engineering. 2002. S. 281–289
Abbott, Charles, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Böhlen, and Neil Sykes. 2002. “New Techniques for Laser Micromachining MEMS Devices.” Conference paper. In Proceedings / SPIE, 4760:281–89. International society for optical engineering. https://doi.org/10.1117/12.482096.
Abbott, Charles, et al. “New Techniques for Laser Micromachining MEMS Devices.” Proceedings / SPIE, vol. 4760, International society for optical engineering, 2002, pp. 281–89, https://doi.org/10.1117/12.482096.


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