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dc.contributor.authorBöhlen, Karl L.-
dc.contributor.authorStassen Böhlen, Ines B.-
dc.date.accessioned2019-03-29T09:51:02Z-
dc.date.available2019-03-29T09:51:02Z-
dc.date.issued2004-
dc.identifier.issn0277-786Xde_CH
dc.identifier.urihttps://digitalcollection.zhaw.ch/handle/11475/16451-
dc.description.abstractA new laser mask projection technique, Synchronised Image Scanning (SIS), has been developed for the efficient fabrication of dense arrays of repeating microstructures on large area substrates. This paper details the technique and provides specific examples of the type of structures that can be produced. SIS is a laser micro-machining technique where the information for the ablation of a specific 3D feature is stored as a linear array on a chrome-on-quartz mask. The feature is then written by synchronised motion and laser firing, such that the firing frequency of the laser corresponds to the spatial pitch of the features. This requires highly accurate laser triggering with low-jitter signals, and accurate stages with high resolution encoders. An add-in for CAD software has been developed to generate the mask pattern efficiently and error-free, using the 3D designs. SIS allows for major improvements in the accuracy and speed with which 3D patterns can be created over large areas by laser ablation. Feature sizes down to a few microns can be produced with excellent surface quality. Large areas of microstructures have wide ranging applications in many areas. One example is the machining of large polymer master panels for electroforming to produce moulds for replication of display enhancement films.de_CH
dc.language.isoende_CH
dc.publisherInternational society for optical engineeringde_CH
dc.relation.ispartofProceedings / SPIEde_CH
dc.rightsLicence according to publishing contractde_CH
dc.subjectLaser processingde_CH
dc.subjectMicro-opticsde_CH
dc.subjectLarge area machiningde_CH
dc.subject3D structurede_CH
dc.subject.ddc621.3: Elektro-, Kommunikations-, Steuerungs- und Regelungstechnikde_CH
dc.titleLaser micromachining of high-density optical structures on large substratesde_CH
dc.typeKonferenz: Paperde_CH
dcterms.typeTextde_CH
zhaw.departementSchool of Engineeringde_CH
zhaw.organisationalunitInstitut für Angewandte Mathematik und Physik (IAMP)de_CH
dc.identifier.doi10.1117/12.537827de_CH
zhaw.conference.detailsLasers and Applications in Science and Engineering, San Jose, USA, 25-29 January 2004de_CH
zhaw.funding.euNode_CH
zhaw.originated.zhawYesde_CH
zhaw.pages.end127de_CH
zhaw.pages.start118de_CH
zhaw.publication.statuspublishedVersionde_CH
zhaw.volume5339de_CH
zhaw.publication.reviewNot specifiedde_CH
zhaw.title.proceedingsPhoton Processing in Microelectronics and Photonics IIIde_CH
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Böhlen, K. L., & Stassen Böhlen, I. B. (2004). Laser micromachining of high-density optical structures on large substrates [Conference paper]. Proceedings / SPIE, 5339, 118–127. https://doi.org/10.1117/12.537827
Böhlen, K.L. and Stassen Böhlen, I.B. (2004) ‘Laser micromachining of high-density optical structures on large substrates’, in Proceedings / SPIE. International society for optical engineering, pp. 118–127. Available at: https://doi.org/10.1117/12.537827.
K. L. Böhlen and I. B. Stassen Böhlen, “Laser micromachining of high-density optical structures on large substrates,” in Proceedings / SPIE, 2004, vol. 5339, pp. 118–127. doi: 10.1117/12.537827.
BÖHLEN, Karl L. und Ines B. STASSEN BÖHLEN, 2004. Laser micromachining of high-density optical structures on large substrates. In: Proceedings / SPIE. Conference paper. International society for optical engineering. 2004. S. 118–127
Böhlen, Karl L., and Ines B. Stassen Böhlen. 2004. “Laser Micromachining of High-Density Optical Structures on Large Substrates.” Conference paper. In Proceedings / SPIE, 5339:118–27. International society for optical engineering. https://doi.org/10.1117/12.537827.
Böhlen, Karl L., and Ines B. Stassen Böhlen. “Laser Micromachining of High-Density Optical Structures on Large Substrates.” Proceedings / SPIE, vol. 5339, International society for optical engineering, 2004, pp. 118–27, https://doi.org/10.1117/12.537827.


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