Publication type: | Conference paper |
Type of review: | Not specified |
Title: | New techniques for laser micromachining MEMS devices |
Authors: | Abbott, Charles Allott, Ric M. Bann, Bob Boehlen, Karl L. Gower, Malcolm C. Rumsby, Phil T. Stassen Böhlen, Ines Sykes, Neil |
DOI: | 10.1117/12.482096 |
Published in: | Proceedings / SPIE |
Proceedings: | High-Power Laser Ablation IV |
Volume(Issue): | 4760 |
Page(s): | 281 |
Pages to: | 289 |
Conference details: | International Symposium on High-Power Laser Ablation 2002, Taos, USA, 21-26 April 2002 |
Issue Date: | 2002 |
Publisher / Ed. Institution: | International society for optical engineering |
ISSN: | 0277-786X |
Language: | English |
Subjects: | Laser micromachining; Inkjet printer nozzle; Plasma display panel |
Subject (DDC): | 621.3: Electrical, communications, control engineering |
Abstract: | Two new laser mask projection techniques Synchronized Image Scanning (SIS) and Bow Tie Scanning (BTS) have been developed for the efficient fabrication of dense arrays of repeating 3D microstructures on large area substrates. Details of these techniques are given and examples of key industrial applications are shown. |
URI: | https://digitalcollection.zhaw.ch/handle/11475/16448 |
Fulltext version: | Published version |
License (according to publishing contract): | Licence according to publishing contract |
Departement: | School of Engineering |
Organisational Unit: | Institute of Applied Mathematics and Physics (IAMP) |
Appears in collections: | Publikationen School of Engineering |
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Abbott, C., Allott, R. M., Bann, B., Boehlen, K. L., Gower, M. C., Rumsby, P. T., Stassen Böhlen, I., & Sykes, N. (2002). New techniques for laser micromachining MEMS devices [Conference paper]. Proceedings / SPIE, 4760, 281–289. https://doi.org/10.1117/12.482096
Abbott, C. et al. (2002) ‘New techniques for laser micromachining MEMS devices’, in Proceedings / SPIE. International society for optical engineering, pp. 281–289. Available at: https://doi.org/10.1117/12.482096.
C. Abbott et al., “New techniques for laser micromachining MEMS devices,” in Proceedings / SPIE, 2002, vol. 4760, pp. 281–289. doi: 10.1117/12.482096.
ABBOTT, Charles, Ric M. ALLOTT, Bob BANN, Karl L. BOEHLEN, Malcolm C. GOWER, Phil T. RUMSBY, Ines STASSEN BÖHLEN und Neil SYKES, 2002. New techniques for laser micromachining MEMS devices. In: Proceedings / SPIE. Conference paper. International society for optical engineering. 2002. S. 281–289
Abbott, Charles, Ric M. Allott, Bob Bann, Karl L. Boehlen, Malcolm C. Gower, Phil T. Rumsby, Ines Stassen Böhlen, and Neil Sykes. 2002. “New Techniques for Laser Micromachining MEMS Devices.” Conference paper. In Proceedings / SPIE, 4760:281–89. International society for optical engineering. https://doi.org/10.1117/12.482096.
Abbott, Charles, et al. “New Techniques for Laser Micromachining MEMS Devices.” Proceedings / SPIE, vol. 4760, International society for optical engineering, 2002, pp. 281–89, https://doi.org/10.1117/12.482096.
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